Concepedia

P. Thanikasalam

PT

2

Publications

50

Citations

2

H-Index

1995

Active since

Affiliations

Arizona State University(Current)

P. Thanikasalam is an author at Arizona State University specializing in chemical kinetics, engineering, and applied physics.

Top concepts

EngineeringApplied PhysicsSurface ScienceMaterial ScienceMicroelectronicsChemical KineticsChemical EngineeringChemistryThin FilmsCrystalline Defects

Publications per year

1995–1996

2

Publications

2

Initial oxidation of silicon (100): A unified chemical model for thin and thick oxide growth rates and interfacial structure

Thomas K. Whidden, P. Thanikasalam, M.J. Rack et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 28 citations

Engineering, Oxidation Resistance, Silicon On Insulator +18

Oxidation of silicon (100): Experimental data versus a unified chemical model

P. Thanikasalam, Thomas K. Whidden, D. K. Ferry · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 22 citations

Engineering, Oxidation Resistance, Molecular Oxygen +17

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