Concepedia

R. Khanna

RK

Statistics

Publications

9

Citations

440

H-Index

9

Active since

1999

Affiliations

Massachusetts Institute of Technology(Current)

Boston University

University of Maryland, College Park

R. Khanna is an author at Massachusetts Institute of Technology specializing in engineering, microfabrication, and microelectronics.

Top concepts

EngineeringMicrofabricationMicroelectronicsMicrofluidicsApplied PhysicsElectrical EngineeringPropulsionMechatronicsMechanical EngineeringMaterial Science

Publications per year

1999–2008

9

Publications

9

High-speed microfabricated silicon turbomachinery and fluid film bearings

Luc G. Fréchette, Seth A. Jacobson, Kenneth Breuer et al. · Journal of Microelectromechanical Systems · 2005 · 144 citations

First Microfabricated Rotors, Engineering, Micromachines +13

Multi-stack silicon-direct wafer bonding for 3D MEMS manufacturing

Norihisa Miki, X. Zhang, R. Khanna et al. · Sensors and Actuators A Physical · 2002 · 85 citations

3D Ic Architecture, Wafer Scale Processing, Engineering +6

Demonstration of a Microfabricated High-Speed Turbine Supported on Gas Bearings

Luc G. Fréchette, Seth A. Jacobson, Kenneth Breuer et al. · 2000 · 69 citations · Full text

Anisotropic silicon trenches 300–500 μm deep employing time multiplexed deep etching (TMDE)

Arturo A. Ayón, Xingcai Zhang, R. Khanna · Sensors and Actuators A Physical · 2001 · 48 citations

Electrical Engineering, Engineering, Microfabrication +5

MEMS fabrication perspectives from the MIT Microengine Project

R. Khanna · Surface and Coatings Technology · 2002 · 25 citations

Engineering, Micromachines, Microfabrication +5

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