Concepedia

Takashi Koromogawa

TK

3

Publications

49

Citations

3

H-Index

1998

Active since

Affiliations

Tokai University(Current)

Canon (Japan)

Takashi Koromogawa is an author at Tokai University specializing in electrical engineering, applied physics, and engineering.

Top concepts

Publications per year

1998–2001

3

Publications

3

Negative Ion Assisted Silicon Oxidation in Downstream of Microwave Plasma

Takashi Koromogawa, Takashi Fujii, Akihito Yamashita et al. · Japanese Journal of Applied Physics · 1998 · 18 citations

, , +16

Production of Large-Diameter Microwave Plasma with a High-Permittivity Material Window

Masakazu Furukawa, Naoki Saito, Katsufumi Kawamura et al. · Japanese Journal of Applied Physics · 1998 · 16 citations

, , +12

Ashing Properties in a Surface-Wave Mode Plasma with a High-Permittivity Alumina Window

Keisuke Shinagawa, Haruo Shindo, Kouta Kusaba et al. · Japanese Journal of Applied Physics · 2001 · 15 citations

, , +11

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