Martin Y. Sohn

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Publications

Citations

102

H-Index

Active since

2013

Affiliations

National Institute of Standards and Technology(Current)

Physical Measurement Laboratory

Martin Y. Sohn is an author at National Institute of Standards and Technology specializing in optics, defect characterization, and nanometer-scale imaging.

ORCID

Publications per year

2013–2022

Publications

Three-dimensional deep sub-wavelength defect detection using λ = 193 nm optical microscopy

Martin Y. Sohn, Francois Goasmat, Hui Zhou et al. · Optics Express · 2013 · 37 citations · Full text

Natural Sciences, Materials Science, Nanomaterials +16

Enhancing 9 nm node dense patterned defect optical inspection using polarization, angle, and focus

Brian M. Barnes, Francois Goasmat, Martin Y. Sohn et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 25 citations

Engineering, Materials Engineering, Physics +17

Effects of wafer noise on the detection of 20-nm defects using optical volumetric inspection

Brian M. Barnes, Francois Goasmat, Martin Y. Sohn et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2015 · 15 citations · Full text

Engineering, Electrical Engineering, Manufacturing Engineering +17

High numerical aperture reflective deep ultraviolet Fourier ptychographic microscopy for nanofeature imaging

Kwan Seob Park, Yoon Sung Bae, Sang-Soo Choi et al. · APL Photonics · 2022 · 15 citations · Full text

Natural Sciences, Physics, Nanomaterials +10

Design of angle-resolved illumination optics using nonimaging bi-telecentricity for 193 nm scatterfield microscopy

Martin Y. Sohn, Brian M. Barnes, Richard M. Silver · Optik · 2017 · 10 citations · Full text

Natural Sciences, Biomedical Engineering, Biophysics +11

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