Concepedia

Francois Goasmat

FG

Statistics

Publications

6

Citations

135

H-Index

6

Active since

2010

Affiliations

National Institute of Standards and Technology(Current)

Physical Measurement Laboratory

Francois Goasmat is an author at National Institute of Standards and Technology specializing in light microscopy, optics, and defect detection.

Publications per year

2010–2015

6

Publications

6

Three-dimensional deep sub-wavelength defect detection using λ = 193 nm optical microscopy

Martin Y. Sohn, Francois Goasmat, Hui Zhou et al. · Optics Express · 2013 · 37 citations · Full text

, , +16

Enhancing 9 nm node dense patterned defect optical inspection using polarization, angle, and focus

Brian M. Barnes, Francois Goasmat, Martin Y. Sohn et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 25 citations

, , +17

Computational Micromodel for Epigenetic Mechanisms

Karthika Raghavan, Heather J. Ruskin, Dimitri Perrin et al. · PLoS ONE · 2010 · 22 citations · Full text

, , +16

Fourier domain optical tool normalization for quantitative parametric image reconstruction

Jing Qin, Richard M. Silver, Brian M. Barnes et al. · Applied Optics · 2013 · 18 citations

, , +15

Scatterfield microscopy of 22-nm node patterned defects using visible and DUV light

Yeungjoon Sohn, Francois Goasmat, Hui Zhou et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 18 citations

, , +16

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