Statistics
Publications
2
Citations
29
H-Index
2
Active since
2010
Affiliations
Intel (United States)(Current)
Yeungjoon Sohn is an author at Intel (United States) specializing in manufacturing engineering, defect detection, and photonics.
Publications per year
2010–2012
2
2
Scatterfield microscopy of 22-nm node patterned defects using visible and DUV light
Yeungjoon Sohn, Francois Goasmat, Hui Zhou et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 18 citations
Engineering, Manufacturing Engineering, Materials Science +16
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