Design of angle-resolved illumination optics using nonimaging bi-telecentricity for 193 nm scatterfield microscopy

Basic Wavefront Aberration Theory for Optical Metrology

James C. Wyant, Katherine Creath · 1992 · 349 citations

Natural Sciences, Physics, Metrology +15

An Optical Super-Microscope for Far-field, Real-time Imaging Beyond the Diffraction Limit

Alex M. H. Wong, George V. Eleftheriades · Scientific Reports · 2013 · 119 citations · Full text

Natural Sciences, Physics, Biomedical Imaging +14

Scatterfield microscopy for extending the limits of image-based optical metrology

Richard M. Silver, Brian M. Barnes, Ravikiran Attota et al. · Applied Optics · 2007 · 70 citations

Engineering, Biomedical Engineering, Biomedical Optics +13

Köhler illumination in the TEM: Fundamentals and advantages

G. Benner, Wolfgang Probst · Journal of Microscopy · 1994 · 45 citations

Natural Sciences, Physics, Optics +13

Deep subwavelength nanometric image reconstruction using Fourier domain optical normalization

Jing Qin, Richard M. Silver, Brian M. Barnes et al. · Light Science & Applications · 2016 · 41 citations · Full text

Engineering, Materials Engineering, Materials Science +15