Statistics
Publications
5
Citations
82
H-Index
5
Active since
2003
Hiroshi Someya is an author specializing in laser-plasma interactions, physics, and photonics.
Publications per year
2003–2009
5
5
Laser-produced-plasma light source development for extreme ultraviolet lithography
Hiroshi Komori, Tamotsu Abe, Takashi Suganuma et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2003 · 24 citations
Natural Sciences, Physics, Optics +16
1–5 of 5