Concepedia

Noritomo Mitsugi

NM

3

Publications

106

Citations

3

H-Index

2004

Active since

Affiliations

Sumco Corporation (Japan)(Current)

Noritomo Mitsugi is an author at Sumco Corporation (Japan) specializing in applied physics, microelectronics, and engineering.

Top concepts

Publications per year

2004–2020

3

Publications

3

Pit Formation Induced by Copper Contamination on Silicon Surface Immersed in Dilute Hydrofluoric Acid Solution

Noritomo Mitsugi, Kiyoshi Nagai · Journal of The Electrochemical Society · 2004 · 52 citations · Full text

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Influence of silicon wafer surface roughness on semiconductor device characteristics

Keiichiro Mori, Shuichi Samata, Noritomo Mitsugi et al. · Japanese Journal of Applied Physics · 2020 · 41 citations · Full text

, , +15

Low-temperature annealing behavior of iron-related deep levels in n-type silicon wafers

Ayumi Onaka‐Masada, Takeshi Kadono, Noritomo Mitsugi et al. · Japanese Journal of Applied Physics · 2016 · 13 citations

, , +18

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