Statistics
Publications
4
Citations
55
H-Index
4
Active since
2005
Affiliations
Wataru Nagatomo is an author at Hitachi High-Tech (Japan) specializing in engineering, metrology, and scanning electron microscope metrology.
Publications per year
2005–2019
4
4
A new matching engine between design layout and SEM image of semiconductor device
Hidetoshi Morokuma, Akiyuki Sugiyama, Yasutaka Toyoda et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 18 citations
Engineering, Electrical Engineering, Manufacturing Engineering +11
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