Chie Shishido

Influence of electron incident angle distribution on CD-SEM linewidth measurements

Maki Tanaka, Chie Shishido, Hiroki Kawada · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 14 citations

Medicine, Computational Engineering, Geometric Modeling +9

Characterizing cross-sectional profile variations by using multiple parameters extracted from top-down SEM images

Chie Shishido, Yuji Takagi, Maki Tanaka et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2002 · 14 citations

Engineering, Electrical Engineering, Materials Science +14

Dose and focus estimation using top-down SEM images

Chie Shishido, Ryo Nakagaki, Maki Tanaka et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 13 citations

Engineering, Biomedical Engineering, Metrology +12

Application of model-based library approach to Si 3 N 4 hardmask measurements

Maki Tanaka, Chie Shishido, Wataru Nagatomo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 12 citations

Engineering, Materials Engineering, Materials Science +17

CD-bias evaluation and reduction in CD-SEM linewidth measurements

Maki Tanaka, Chie Shishido, Wataru Nagatomo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 11 citations

Engineering, Computer Engineering, Biomedical Imaging +16