Toyoharu Inoue is an author at Ushio (Japan) specializing in photonics, engineering, and microelectronics.
Top concepts
PhotonicsEngineeringApplied PhysicsOptoelectronicsMicroelectronicsHigh-power LasersLaser ApplicationsGas LasersLaser DesignLaser Control
Publications per year
2005–2006
3
3
High power injection lock 6 kHz 60 W laser for ArF dry/wet lithography
Hakaru Mizoguchi, Toyoharu Inoue, Junichi Fujimoto et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 14 citations
Photonics, Advanced Laser Processing, Injection Lock Technology +13
Rows per page
1–3 of 3