Concepedia

Koji Kakizaki

KK

2

Publications

43

Citations

2

H-Index

2006

Active since

Affiliations

The University of Tokyo(Current)

Koji Kakizaki is an author at The University of Tokyo specializing in high-power lasers, optical properties, and photonics.

Top concepts

Publications per year

2006–2016

2

Publications

2

High-repetition-rate (6kHz) and long-pulse-duration (50ns) ArF excimer laser for sub-65nm lithography

Koji Kakizaki, Yōichi Sasaki, Toyoharu Inoue et al. · Review of Scientific Instruments · 2006 · 23 citations

, , +22

Development of high coherence high power 193nm laser

Satoshi Tanaka, Masaki Arakawa, Atsushi Fuchimukai et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 20 citations

, , +13

Rows per page

1–2 of 2