Concepedia

Nomin Lim

NL

Statistics

Publications

8

Citations

200

H-Index

8

Active since

2014

Affiliations

Korea University(Current)

Ivanovo State University of Chemistry and Technology

Nomin Lim is an author at Korea University specializing in materials science, natural sciences, and surface science.

Publications per year

2014–2021

8

Publications

8

Study on the surface energy characteristics of polydimethylsiloxane (PDMS) films modified by C4F8/O2/Ar plasma treatment

Yong Geun Kim, Nomin Lim, Jihun Kim et al. · Applied Surface Science · 2017 · 51 citations

, , +14

Application of Si and SiO<sub>2</sub> Etching Mechanisms in CF<sub>4</sub>/C<sub>4</sub>F<sub>8</sub>/Ar Inductively Coupled Plasmas for Nanoscale Patterns

Junmyung Lee, Alexander Efremov, Geun Young Yeom et al. · Journal of Nanoscience and Nanotechnology · 2015 · 37 citations

, , +17

A Comparison of CF4, CHF3 and C4F8 + Ar/O2 Inductively Coupled Plasmas for Dry Etching Applications

Nomin Lim, Alexander Efremov, Kwang‐Ho Kwon · Plasma Chemistry and Plasma Processing · 2021 · 26 citations

, , +10

On the Etching Characteristics and Mechanisms of HfO&lt;SUB&gt;2&lt;/SUB&gt; Thin Films in CF&lt;SUB&gt;4&lt;/SUB&gt;/O&lt;SUB&gt;2&lt;/SUB&gt;/Ar and CHF&lt;SUB&gt;3&lt;/SUB&gt;/O&lt;SUB&gt;2&lt;/SUB&gt;/Ar Plasma for Nano-Devices

Nomin Lim, Alexander Efremov, Geun Young Yeom et al. · Journal of Nanoscience and Nanotechnology · 2014 · 20 citations

, , +17

Gas-phase chemistry and etching mechanism of SiNx thin films in C4F8 + Ar inductively coupled plasma

Nomin Lim, Alexander Efremov, Kwang‐Ho Kwon · Thin Solid Films · 2019 · 20 citations

, , +13

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