Concepedia

M. Fujinaga

MF

Statistics

Publications

4

Citations

99

H-Index

4

Active since

1990

Affiliations

Mitsubishi Electric (Japan)(Current)

Mitsubishi Group (Japan)

M. Fujinaga is an author at Mitsubishi Electric (Japan) specializing in materials science, engineering, and materials engineering.

Publications per year

1990–1997

4

Publications

4

Three-dimensional topography simulation model: etching and lithography

M. Fujinaga, N. Kotani, T. Kunikiyo et al. · IEEE Transactions on Electron Devices · 1990 · 30 citations

Engineering, Materials Engineering, 3D Modeling +15

3-D topography simulator (3-D MULSS) based on a physical description of material topography

M. Fujinaga, N. Kotani · IEEE Transactions on Electron Devices · 1997 · 28 citations

Engineering, Materials Engineering, Materials Science +14

Reverse short-channel effect due to lateral diffusion of point-defect induced by source/drain ion implantation

T. Kunikiyo, K. Mitsui, M. Fujinaga et al. · IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems · 1994 · 28 citations

Engineering, Electrical Engineering, Materials Science +14

Stable Solution Method for Viscoelastic Oxidation Including Stress-Dependent Viscosity

Tetsuya Uchida Tetsuya Uchida, M. Fujinaga, N. Kotani et al. · Japanese Journal of Applied Physics · 1996 · 13 citations

Natural Sciences, Materials Engineering, Materials Science +17

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