Concepedia
Statistics
Publications
12
Citations
277
H-Index
11
Active since
2003
Affiliations
Fujifilm (Japan)(Current)
The University of Tokyo
Chuo University
Saitama Institute of Technology
Tokyo Institute of Technology
Sou Kamimura is an author at Fujifilm (Japan) specializing in engineering, chemistry, and microelectronics.
Top concepts
EngineeringChemistryMaterial ScienceMicroelectronicsChemical EngineeringMaterials EngineeringApplied PhysicsPolymer ScienceNatural SciencesPolymer Chemistry
Publications per year
2003–2013
Formation of Vinylidenes from Internal Alkynes at a Cyclotriphosphato Ruthenium Complex
Yousuke Ikeda, Takafumi N. Yamaguchi, Keiichiro Kanao et al. · Journal of the American Chemical Society · 2008 · 76 citations
Ruthenium Cyclotriphosphato, Inorganic Chemistry, Engineering +11
Synthesis of Ferromagnetic Mn−Pt Nanoparticles from Organometallic Precursors
Kanta Ono, Ryuichi Okuda, Yoichi Ishii et al. · The Journal of Physical Chemistry B · 2003 · 36 citations
Nanoparticles, Magnetic Properties, Engineering +18
Development of materials and processes for negative tone development toward 32-nm node 193-nm immersion double-patterning process
Shinji Tarutani, Hideaki Tsubaki, Sou Kamimura · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 27 citations
Materials Science, Materials Engineering, New Negative Tone +13
A Resist Material Study for LWR and Resolution Improvement in EUV Lithography
Katsuhiro Yamashita, Sou Kamimura, Hidenori Takahashi et al. · Journal of Photopolymer Science and Technology · 2008 · 21 citations · Full text
Engineering, Electron-beam Lithography, Euv Lithography +19
Reduction of the Outgassing Segments and LWR Improvement for the Next Generation EUV Lithography
Seiya Masuda, Shinji Tarutani, Sou Kamimura et al. · Journal of Photopolymer Science and Technology · 2007 · 19 citations · Full text
Electrical Engineering, Chemical Engineering, Engineering +14
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