S. Irmer

Stress investigation of PECVD dielectric layers for advanced optical MEMS

A. Tarraf, J. Daleiden, S. Irmer et al. · Journal of Micromechanics and Microengineering · 2003 · 121 citations

Detailed Stress Investigations, Optical Materials, Engineering +23

Ultralow biased widely continuously tunable fabry-Perot filter

S. Irmer, J. Daleiden, Ventzeslav Rangelov et al. · IEEE Photonics Technology Letters · 2003 · 61 citations

Photonics, Optical Materials, Engineering +15

Potential for micromachined actuation of ultra-wide continuously tunable optoelectronic devices

Hartmut Hillmer, J. Daleiden, C. Prott et al. · Applied Physics B · 2002 · 39 citations

Photonics, Electrical Engineering, Electronic Devices +13

Modeling of ultrawidely tunable vertical cavity air-gap filters and VCSELs

C. Prott, Friedhard Römer, Edwin Ataro et al. · IEEE Journal of Selected Topics in Quantum Electronics · 2003 · 32 citations

Short Wavelength Optic, Optical Materials, Engineering +21

Record tuning range of InP-based multiple air-gap MOEMS filter

J. Daleiden, Ventzeslav Rangelov, S. Irmer et al. · Electronics Letters · 2002 · 25 citations