Applied Physics B · 2002 · 39 citations · 0 references
EngineeringElectrical EngineeringMaterials ScienceMicrofabricationOptoelectronicsPhotonicsMems ActuatorsMicromachiningOptical MemsOptical Thin FilmsOptoelectronic DevicesOptoelectronic MaterialsDevice FabricationMicroelectromechanical ActuatorsMicroelectromechanical Systems Optical SwitchingMicroresonatorsTunable Photonic Devices