Ultralow biased widely continuously tunable fabry-Perot filter

Abstract

Optical filters capable of single control parameter-based wide tuning are implemented and studied. The surface micromachined Fabry-Perot filter consists of two InP-air-gap distributed Bragg reflectors and shows a wavelength tuning of more than 140 nm using only a single voltage of up to 3.2 V at currents below 0.2 mA. The membrane-based filter is designed to block all wavelengths in the whole range of 1250-1800 nm apart from its transmission wavelength.