Record tuning range of InP-based multiple air-gap MOEMS filter

Abstract

Continuously tunable Fabry-Perot filters based on multiple InP/air-gap MOEMS technology are presented. Record wavelength tuning >112 nm with an actuation voltage of only 5 V is demonstrated. The FWHM remains constant over the entire tuning range. The stopband covers both the second and third optical telecommunication window (1250–1800 nm).