Concepedia
Statistics
Publications
2
Citations
28
H-Index
Active since
2000
Affiliations
CEA Grenoble(Current)
Sumitomo Chemical (Japan)
Commissariat à l'Énergie Atomique et aux Énergies Alternatives
Centre National de la Recherche Scientifique
Masumi Suetsugu is an author at CEA Grenoble specializing in resist resolution, thin film resist processing, and materials science.
Publications per year
2000–2004
Resolution limit of negative tone chemically amplified resist used for hybrid lithography: Influence of the molecular weight
L. Pain, Craig Higgins, B. Scarfoglière et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 15 citations
Natural Sciences, Materials Engineering, Materials Science +12
High-Resolution Hybrid Lithography with Negative Tone Chemically Amplified Resists
S. Landis, S. Pauliac, J. Saint-Pol et al. · Japanese Journal of Applied Physics · 2004 · 13 citations
Engineering, Electrical Engineering, Materials Science +10
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