Concepedia

Naoki Yasui

NY

2

Publications

37

Citations

2

H-Index

2015

Active since

Affiliations

Hitachi High-Tech (Japan)(Current)

Naoki Yasui is an author at Hitachi High-Tech (Japan) specializing in applied physics, engineering, and microfabrication.

Top concepts

EngineeringApplied PhysicsMicroelectronicsMicrofabricationElectrical EngineeringNanoelectronicsSurface ScienceMaterial ScienceElectronic PackagingMaterials Engineering

Publications per year

2015–2017

2

Publications

2

Selective atomic-level etching using two heating procedures, infrared irradiation and ion bombardment, for next-generation semiconductor device manufacturing

Kazunori Shinoda, Nobuya Miyoshi, Hiroyuki Kobayashi et al. · Journal of Physics D Applied Physics · 2017 · 25 citations

Engineering, Electron-beam Lithography, Target Fabrication +21

(Invited) Plasma Etching Technology Challenges for Future CMOS Fabrication Based on Microwave ECR Plasma

Masaru Izawa, Motohiro Tanaka, Naoki Yasui et al. · ECS Transactions · 2015 · 12 citations

Future Cmos Fabrication, Electrical Engineering, Gas Injection +15

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