Concepedia

L. E. Stillwagon

LE

9

Publications

551

Citations

9

H-Index

1978

Active since

Affiliations

AT&T (United States)(Current)

Alcatel Lucent (Germany)

L. E. Stillwagon is an author at AT&T (United States) specializing in engineering, materials science, and applied physics.

Top concepts

EngineeringMaterial ScienceApplied PhysicsSurface ScienceThin FilmsChemistryPolymer ScienceMicrofabricationPolymer ChemistryPolymer Processing

Publications per year

1978–1992

9

Publications

9

Leveling of thin films over uneven substrates during spin coating

L. E. Stillwagon, Ronald G. Larson · Physics of Fluids A Fluid Dynamics · 1990 · 178 citations

Materials Science, Surface Technology, Thin Film Physics +14

Fundamentals of topographic substrate leveling

L. E. Stillwagon, Ronald G. Larson · Journal of Applied Physics · 1988 · 124 citations

Materials Science, Topographic Substrate Leveling, Engineering +15

Planarization of Substrate Topography by Spin Coating

L. E. Stillwagon, Ronald G. Larson, Gary N. Taylor · Journal of The Electrochemical Society · 1987 · 74 citations

Materials Science, Spintronics, Spin‐coating Process +15

Gas‐Phase‐Functionalized Plasma‐Developed Resists:Initial Concepts and Results for Electron‐Beam Exposure

Gary N. Taylor, L. E. Stillwagon, T. Venkatesan · Journal of The Electrochemical Society · 1984 · 40 citations

Engineering, Electron-beam Lithography, Plasma Physics +18

Negative electron resists for direct fabrication of devices

L. F. Thompson, L. E. Stillwagon, E. M. Doerries · Journal of Vacuum Science and Technology · 1978 · 39 citations

Engineering, Electron-beam Lithography, Beam Milling +22

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