Concepedia
Statistics
Publications
2
Citations
66
H-Index
Active since
1994
Affiliations
Shipley Hospital(Current)
Mark Denison is an author at Shipley Hospital specializing in applied physics, chemistry, and engineering.
Top concepts
ChemistryEngineeringApplied PhysicsMaterial SciencePhotovoltaicsOptoelectronicsPolymer ScienceSurface ScienceMicrofabricationChemical Kinetics
Publications per year
1994–1994
Effect of acid diffusion on performance in positive deep ultraviolet resists
T. H. Fedynyshyn, James W. Thackeray, Jacque H. Georger et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 56 citations
Materials Science, Chemical Kinetics, Engineering +12
The Development of Chemically Amplified Positive- and Negative-tone Resists for DUV Lithography.
James W. Thackeray, Tim Adams, Michael F. Cronin et al. · Journal of Photopolymer Science and Technology · 1994 · 10 citations · Full text
High Resolution, Engineering, Electron-beam Lithography +24
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