Siegfried Stacklies is an author at Carl Zeiss (Germany) specializing in applied physics, engineering, and instrumentation.
Top concepts
EngineeringApplied PhysicsInstrumentationMaterial ScienceMicroelectronicsMicrofabricationOptical MaterialsEducationPhotonicsMicroscopy
Publications per year
2000–2004
3
3
Udo Dinger, F. Eisert, Holger Lasser et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 37 citations
Optical Materials, Engineering, Electron-beam Lithography +17
Peter Kürz, Hans-Jürgen Mann, Martin Antoni et al. · 2002 · 16 citations
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