Guenther Seitz - Concepedia

Author

Guenther Seitz

Also Known As

Guenther Seitz

Publications

Citations

H-Index

Concepts

All Affiliations

Guenther Seitz is an author at Carl Zeiss (Germany) specializing in engineering, applied physics, and instrumentation.

#	Concept	H-Index	Publications	Citations
1	Engineering	3	3	76
2	Applied Physics	2	2	59
3	Materials Science	2	2	59
4	Education	1	1	37
5	Natural Sciences	1	1	17

Guenther Seitz

Publications

Citations

H-Index

Page 1

	Year	Citations
<title>Mirror substrates for EUV lithography: progress in metrology and optical fabrication technology</title> Udo Dinger, F. Eisert, Holger Lasser, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Optical MaterialsEngineeringElectron-beam LithographyEuv LithographyOptic Design	2000	37
Fabrication and metrology of diffraction limited soft x-ray optics for the EUV microlithography Udo Dinger, Guenther Seitz, S. Schulte, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Scan MachinesEngineeringElectron-beam LithographyMicroscopyOptical Testing	2004	22
Resolution limits of active triangulation systems by defocusing Guenther Seitz Optical Engineering EngineeringGeometryField RoboticsComputer-aided DesignTriangulation Triangle	1993	17

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