39
Publications
473
Citations
13
H-Index
44
Concepts
All Affiliations
| # | Concept | H-Index | Publications | Citations |
|---|---|---|---|---|
1 | Engineering | 8 | 8 | 255 |
2 | Natural Sciences | 6 | 6 | 213 |
3 | Applied Physics | 6 | 6 | 222 |
4 | Education | 1 | 1 | 37 |
5 | Health Sciences | 1 | 1 | 14 |
Udo Dinger
×
14
Publications
411
Citations
12
H-Index
| Year | Citations | |
|---|---|---|
1987 | 104 | |
1991 | 56 | |
2000 | 37 | |
2001 | 32 | |
1992 | 29 | |
1989 | 28 | |
Fabrication and metrology of diffraction limited soft x-ray optics for the EUV microlithography Udo Dinger, Guenther Seitz, S. Schulte, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Scan MachinesEngineeringElectron-beam LithographyMicroscopyOptical Testing | 2004 | 22 |
1987 | 19 | |
1990 | 18 | |
2002 | 16 |
Page 1
Page 1