Martin Antoni - Concepedia

Author

Martin Antoni

Also Known As

Antoni, Martin, M. Antoni, Martin Antoni

Publications

Citations

H-Index

Concepts

All Affiliations

Martin Antoni is an author at Carl Zeiss (Germany) specializing in optical systems, engineering, and instrumentation.

#	Concept	H-Index	Publications	Citations
1	Engineering	3	3	47
2	Applied Physics	2	2	34
3	Education	1	1	13
4	Materials Science	1	1	18
5	Optical Engineering	1	1	18

Martin Antoni

Publications

Citations

H-Index

Page 1

	Year	Citations
EUV spectral purity filter: optical and mechanical design, grating fabrication, and testing Holger Kierey, Klaus Heidemann, Bernd H. Kleemann, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Optical MaterialsEngineeringOptic DesignOptical TestingLaser Applications	2004	18
Optics for EUV lithography Peter Kürz, Hans-Jürgen Mann, Martin Antoni, PhotonicsOptical MaterialsEngineeringExtreme Ultraviolet LithographyBeam Lithography	2002	16
<title>Illumination optics design for EUV lithography</title> Martin Antoni, Wolfgang Singer, Jörg Schultz, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE EngineeringElectron-beam LithographyOptic DesignDifferent SolutionsEducation	2000	13

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