Concepedia

Martin Antoni

MA

3

Publications

47

Citations

3

H-Index

2000

Active since

Affiliations

Carl Zeiss (Germany)(Current)

Martin Antoni is an author at Carl Zeiss (Germany) specializing in optical systems, engineering, and instrumentation.

Top concepts

Publications per year

2000–2004

3

Publications

3

EUV spectral purity filter: optical and mechanical design, grating fabrication, and testing

Holger Kierey, Klaus Heidemann, Bernd H. Kleemann et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 18 citations

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Optics for EUV lithography

Peter Kürz, Hans-Jürgen Mann, Martin Antoni et al. · 2002 · 16 citations

, , +13

<title>Illumination optics design for EUV lithography</title>

Martin Antoni, Wolfgang Singer, Jörg Schultz et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2000 · 13 citations

, , +18

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