Concepedia

M. Kitakata

MK

3

Publications

46

Citations

3

H-Index

1989

Active since

Affiliations

NEC (Japan)(Current)

M. Kitakata is an author at NEC (Japan) specializing in materials science, applied physics, and engineering.

Top concepts

Publications per year

1989–2003

3

Publications

3

The impact of nitrogen profile engineering on ultrathin nitrided oxide films for dual-gate CMOS ULSI

Eiji HASEGAWA, M. Kawata, K. Ando et al. · 2002 · 19 citations

, , +12

New gettering using misfit dislocations in homoepitaxial wafers with heavily boron-doped silicon substrates

Hiroaki Kikuchi, M. Kitakata, Fumitoshi Toyokawa et al. · Applied Physics Letters · 1989 · 15 citations

, , +16

A high performance polysilicon TFT using RTA and plasma hydrogenation applicable to highly stable SRAMs of 16 Mbit and beyond

F. Hayashi, M. Kitakata · 2003 · 12 citations

, , +11

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