Osami Okada

Reaction of atomic fluorine with silicon

Ken Ninomiya, Keizô Suzuki, Shigeru Nishimatsu et al. · Journal of Applied Physics · 1985 · 72 citations

Chemical Engineering, Engineering, Nanotechnology +15

Experimental Study of a Plasma Flow in a Magnetic Nozzle

Kyoichi Kuriki, Osami Okada · The Physics of Fluids · 1970 · 42 citations

Magnetism, Electrical Engineering, Engineering +13

Magnetic flux loss in rare-earth magnets irradiated with 200 MeV protons

Yoshifumi Ito, Keisuke Yasuda, Ryoya Ishigami et al. · Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms · 2001 · 38 citations

Magnetism, Engineering, Mev Protons +7

An experimental system for surface reaction studies in microwave plasma etching

Ken Ninomiya, Keizô Suzuki, Shigeru Nishimatsu et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1984 · 36 citations

Engineering, Surface Reaction Studies, Plasma Processing +18

Role of sulfur atoms in microwave plasma etching of silicon

Ken Ninomiya, Keizô Suzuki, Shigeru Nishimatsu et al. · Journal of Applied Physics · 1987 · 33 citations

Engineering, Vacuum Device, Chemistry +16