Michael Banasch

Enhanced e-beam pattern writing for nano-optics based on character projection

E. B. Kley, Holger Schmidt, Uwe D. Zeitner et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 21 citations

Natural Sciences, Materials Science, Nanotechnology +7

Rowland ghost suppression in high efficiency spectrometer gratings fabricated by e-beam lithography

Martin Heusinger, Michael Banasch, Uwe D. Zeitner · Optics Express · 2017 · 20 citations · Full text

Natural Sciences, Physics, Microfabrication +11

Potential of E-beam lithography for micro- and nano-optics fabrication on large areas

Uwe D. Zeitner, Michael Banasch, Marcus Trost · Journal of Micro/Nanopatterning Materials and Metrology · 2023 · 19 citations · Full text

Engineering, Manufacturing Engineering, Materials Science +10

Optical metasurfaces made by cell projection lithography

M. Hädrich, Thomas Siefke, Michael Banasch et al. · PhotonicsViews · 2022 · 15 citations

Engineering, Manufacturing Engineering, Materials Engineering +11

Multi-stencil character projection e-beam lithography: a fast and flexible way for high quality optical metamaterials

Uwe Huebner, Matthias Falkner, Uwe D. Zeitner et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 13 citations

Natural Sciences, Materials Engineering, Materials Science +10