Optical metasurfaces made by cell projection lithography

Abstract

Abstract Metasurfaces offer promising possibilities for emerging photonic applications like see‐through, near‐eye displays. Vistec Electron Beam lithography systems with variable shaped beam (VSB) and cell projection (CP) technology provide a flexible solution to generate repetitive structures on large substrates. Excellent pattern fidelity is achieved in a feasible write‐time, enabling prototyping or the manufacturing of replication masters.