Paul E. Luscher

Statistics

Publications

Citations

165

H-Index

Active since

1977

Affiliations

University of Illinois Urbana-Champaign(Current)

Paul E. Luscher is an author at University of Illinois Urbana-Champaign specializing in materials science, materials engineering, and surface physics.

Publications per year

1977–1996

Publications

Study of cleaved, oxidized, etched, and heat-treated CdTe surfaces

J.-P. Häring, J. G. Werthen, Richard H. Bube et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1983 · 76 citations

Engineering, Materials Engineering, Materials Science +17

Energy loss mechanisms in low energy electron scattering from W(100) and their use as a surface sensitive spectroscopy

Paul E. Luscher · Surface Science · 1977 · 29 citations

Natural Sciences, Materials Science, Physics +13

Design considerations for molecular beam epitaxy systems

Paul E. Luscher, D. M. Collins · Progress in Crystal Growth and Characterization · 1979 · 26 citations

Engineering, Materials Engineering, Materials Science +13

W(100)+O<sub>2</sub>: Adsorption and reaction

Paul E. Luscher, F. M. Propst · Journal of Vacuum Science and Technology · 1977 · 24 citations

Natural Sciences, Materials Science, Physics +17

M<i>x</i>P+: A new dielectric etcher with enabling technology, high productivity, and low cost-of-consumables

Hongching Shan, Evans Lee, Michael Welch et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 10 citations

Engineering, Manufacturing Engineering, Materials Engineering +17

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