Concepedia

Hongching Shan

HS

2

Publications

28

Citations

2

H-Index

1996

Active since

Affiliations

Applied Materials (United States)(Current)

Hongching Shan is an author at Applied Materials (United States) specializing in electronic packaging, microfabrication, and electrical insulation.

Top concepts

Publications per year

1996–1996

2

Publications

2

Process kit and wafer temperature effects on dielectric etch rate and uniformity of electrostatic chuck

Hongching Shan, Bryan Pu, Gao Hua et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 18 citations

, , +12

M<i>x</i>P+: A new dielectric etcher with enabling technology, high productivity, and low cost-of-consumables

Hongching Shan, Evans Lee, Michael Welch et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 10 citations

, , +20

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