23
Publications
1.1K
Citations
17
H-Index
1988
Active since
Affiliations
B. W. Hussey is an author at IBM Research - Thomas J. Watson Research Center specializing in engineering, applied physics, and materials science.
Top concepts
EngineeringApplied PhysicsMaterial SciencePhysicsThin FilmsSuperconductivityLaser ApplicationsSurface ScienceMaterials EngineeringHigh-power Lasers
Publications per year
1988–1996
23
23
Electron-beam microcolumns for lithography and related applications
T. H. P. Chang, M. G. R. Thomson, E. Kratschmer et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 122 citations
Materials Science, Engineering, Electron-beam Lithography +15
Experimental evaluation of a 20×20 mm footprint microcolumn
E. Kratschmer, H. S. Kim, M. G. R. Thomson et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 62 citations
Electron Emitter, Engineering, Electron-beam Lithography +21
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