Concepedia

Kohei Mizotani

KM

Statistics

Publications

4

Citations

70

H-Index

4

Active since

2012

Affiliations

The University of Osaka(Current)

Tokyo Electron (Japan)

Kohei Mizotani is an author at The University of Osaka specializing in nanoelectronics, microelectronics, and surface science.

Top concepts

EngineeringApplied PhysicsNanoelectronicsSurface ScienceMicroelectronicsMaterials EngineeringPhysicsMicrofabricationElectrical EngineeringHydrogen

Publications per year

2012–2015

4

Publications

4

Molecular dynamics simulation of silicon oxidation enhanced by energetic hydrogen ion irradiation

Kohei Mizotani, Michiro Isobe, Masanaga Fukasawa et al. · Journal of Physics D Applied Physics · 2015 · 21 citations

Engineering, Molecular Dynamics Simulation, Computational Chemistry +24

Si Damage Due to Oblique-Angle Ion Impact Relevant for Vertical Gate Etching Processes

Tomoko Ito, Kazuhiro Karahashi, Kohei Mizotani et al. · Japanese Journal of Applied Physics · 2012 · 18 citations

Materials Engineering, Electrical Engineering, Ion Implantation +14

Molecular dynamic simulation of damage formation at Si vertical walls by grazing incidence of energetic ions in gate etching processes

Kohei Mizotani, Michiro Isobe, Satoshi Hamaguchi · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2015 · 16 citations · Full text

Engineering, Silicon On Insulator, Ion Implantation +16

Si Damage Due to Oblique-Angle Ion Impact Relevant for Vertical Gate Etching Processes

Tomoko Ito, Kazuhiro Karahashi, Kohei Mizotani et al. · Japanese Journal of Applied Physics · 2012 · 15 citations

Materials Engineering, Electrical Engineering, Ion Implantation +14

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