Concepedia

W. Lur

WL

9

Publications

327

Citations

9

H-Index

1988

Active since

Affiliations

National Tsing Hua University(Current)

United Microelectronics (Taiwan)

National Sun Yat-sen University

National Yang Ming Chiao Tung University

National Institutes of Applied Research

W. Lur is an author at National Tsing Hua University specializing in engineering, applied physics, and surface science.

Top concepts

Publications per year

1988–2002

9

Publications

9

Growth kinetics of amorphous interlayer formed by interdiffusion of polycrystalline Ti thin-film and single-crystal silicon

W. Lur, L. J. Chen · Applied Physics Letters · 1989 · 90 citations

, , +15

Effective repair to ultra-low-<i>k</i> dielectric material (<i>k</i>∼2.0) by hexamethyldisilazane treatment

Y. S. Mor, Ting‐Chang Chang, Po‐Tsun Liu et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 81 citations

, , +13

Interfacial reactions of titanium thin films on BF+2 -implanted (001)Si

W. Lur, L. J. Chen · Journal of Applied Physics · 1989 · 35 citations

, , +14

Interfacial reactions of cobalt thin films on BF+2 ion-implanted (001) silicon

W. Lur, L. J. Chen · Journal of Applied Physics · 1988 · 28 citations

, , +13

Effects of a new combination of additives in electroplating solution on the properties of Cu films in ULSI applications

Jiumei Hu, T. C. Chang, Chia‐Hua Wu et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2000 · 22 citations

, , +20

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