Concepedia

Masachika Toguchi

MT

Statistics

Publications

7

Citations

150

H-Index

7

Active since

2018

Affiliations

Hokkaido University(Current)

Hitachi (Japan)

Nagoya University

Hosei University

Masachika Toguchi is an author at Hokkaido University specializing in electronic materials, materials science, and etching processes.

Publications per year

2018–2020

7

Publications

7

Effects of a photo-assisted electrochemical etching process removing dry-etching damage in GaN

Satoru Matsumoto, Masachika Toguchi, Kentaro Takeda et al. · Japanese Journal of Applied Physics · 2018 · 41 citations · Full text

Engineering, Electrical Engineering, Materials Science +17

Simple wet-etching technology for GaN using an electrodeless photo-assisted electrochemical reaction with a luminous array film as the UV source

Fumimasa Horikiri, Noboru Fukuhara, Hiroshi Ohta et al. · Applied Physics Express · 2019 · 31 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Electrodeless photo-assisted electrochemical etching of GaN using a H<sub>3</sub>PO<sub>4</sub>-based solution containing S<sub>2</sub>O<sub>8</sub> <sup>2–</sup> ions

Masachika Toguchi, Kazuki Miwa, Fumimasa Horikiri et al. · Applied Physics Express · 2019 · 22 citations · Full text

Natural Sciences, Materials Engineering, Materials Science +17

Self-termination of contactless photo-electrochemical (PEC) etching on aluminum gallium nitride/gallium nitride heterostructures

Kazuki Miwa, Y. Komatsu, Masachika Toguchi et al. · Applied Physics Express · 2020 · 17 citations · Full text

Engineering, Electrical Engineering, Materials Science +17

Depth profiling of surface damage in n-type GaN induced by inductively coupled plasma reactive ion etching using photo-electrochemical techniques

Shinji Yamada, Kentaro Takeda, Masachika Toguchi et al. · Applied Physics Express · 2020 · 15 citations

Engineering, Materials Engineering, Materials Science +17

1–5 of 7