3-Axis gyroscope with Si nanogage piezo-resistive detection

Arnaud Walther, M. Savoye, Guillaume Jourdan, +7

3-Axis GyroscopeElectrical EngineeringBiomedical SensorsEngineeringSensors +12

Wafer Level Thin Film Encapsulation for MEMS

C. Gillot, E. Lagoutte, P.L. Charvet, +2

Materials ScienceElectrical EngineeringChip-scale PackageEngineeringAdvanced Packaging (Semiconductors) +13

Reliability assessment and failure mode analysis of MEMS accelerometers for space applications

I. Marozau, Maxime Auchlin, Václav Pejchal, +5

Microelectronics Reliability

ReliabilityReliability EngineeringEngineeringHardware ReliabilityMems Accelerometers +13

Thin film packaged redundancy RF MEMS switches for space applications

F. Souchon, D. Saint-Patrice, Jean-Louis Pornin, +3

EngineeringMicro-electromechanical SystemElectromagnetic CompatibilityAdvanced Packaging (Semiconductors)Rf Mems +15

Dielectric Charging Sensitivity on MEMS Switches

F. Souchon, PL. Charvet, C. Maeder-Pachurka, +1

TRANSDUCERS 2007 - 2007 International Solid-State Sensors, Actuators and Microsystems Conference

Sweeping TestsDielectric Charging IdentificationElectrical EngineeringEngineeringDielectric Charging +6

Modeling of dielectric charging in electrostatic MEMS switches

Adam Koszewski, F. Souchon, Ch. Dieppedale, +1

Microelectronics Reliability

Device ModelingElectrical EngineeringEngineeringMicroelectronicsMicro-electromechanical System +2

Low power damping control of a resonant sensor using back action in silicon nanowires

Guillaume Lehée, F. Souchon, Jean-Christophe Riou, +2

Silicon NanowiresEngineeringMicro-electromechanical SystemVibrationsNanoelectronics +15

P-type silicon nanogauge based self-sustained oscillator

Guillaume Lehée, R. Anciant, F. Souchon, +3

Electrical EngineeringVibrationsEngineeringOscillatorsMicromachines +13

Key improvements of the MEMS switch lifetime thanks to a dielectric-free design and contact reliability investigations in hot/cold switching operations

F. Souchon, Bruno Reig, C. Dieppedale, +4

DielectricsEngineeringCharge AccumulationMicro-electromechanical SystemElectronic Packaging +18

Study of mechanical properties of RF MEMS switches by nanoindentation: characterization and modeling of electro-mechanical behavior

Adam Koszewski, Diane Levy, F. Souchon

Sensors and Actuators A Physical

Materials ScienceElectrical EngineeringElectro-mechanical BehaviorEngineeringMechanical Properties +12