M. Savoye

Statistics

Publications

Citations

100

H-Index

Active since

2005

Affiliations

Commissariat à l'Énergie Atomique et aux Énergies Alternatives(Current)

CEA Grenoble

Laboratoire d'Électronique des Technologies de l'Information

Université Grenoble Alpes

Institut polytechnique de Grenoble

M. Savoye is an author at Commissariat à l'Énergie Atomique et aux Énergies Alternatives specializing in microelectronics, engineering, and semiconductor devices.

Publications per year

2005–2014

Publications

3-Axis gyroscope with Si nanogage piezo-resistive detection

Arnaud Walther, M. Savoye, Guillaume Jourdan et al. · 2012 · 34 citations

Engineering, Electrical Engineering, Mechanical Engineering +14

Understanding CMP-induced delamination in ultra low-k/Cu integration

Philip R. LeDuc, M. Savoye, S. Maı̂trejean et al. · 2005 · 22 citations

Natural Sciences, Materials Engineering, Materials Science +14

Dependence of CMP-induced delamination on number of low-k dielectric films stacked

Patrick Leduc, Thierry Farjot, M. Savoye et al. · Microelectronic Engineering · 2006 · 17 citations

Natural Sciences, Materials Engineering, Materials Science +14

Fully monolithic and ultra-compact NEMS-CMOS self-oscillator based-on single-crystal silicon resonators and low-cost CMOS circuitry

J. Philippe, G. Arndt, Éric Colinet et al. · 2014 · 15 citations

Engineering, Electrical Engineering, Analog Electronics +15

VLSI platform for the monolithic integration of single-crystal Si NEMS capacitive resonators with low-cost CMOS

Julien Arcamone, M. Savoye, G. Arndt et al. · 2012 · 12 citations

Engineering, Computer Engineering, Electrical Engineering +16

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