Concepedia

K. L. Seaward

KL

11

Publications

299

Citations

11

H-Index

1978

Active since

Affiliations

Hewlett-Packard (United States)(Current)

PerkinElmer (United States)

Stanford University

K. L. Seaward is an author at Hewlett-Packard (United States) specializing in engineering, applied physics, and materials science.

Top concepts

Publications per year

1978–1997

11

Publications

11

An analytical study of etch and etch-stop reactions for GaAs on AlGaAs in CCl2F2 plasma

K. L. Seaward, N. Moll, D. Coulman et al. · Journal of Applied Physics · 1987 · 82 citations

, , +10

Role of ions in electron cyclotron resonance plasma-enhanced chemical vapor deposition of silicon dioxide

K. L. Seaward, J. E. Turner, K. Nauka et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 39 citations · Full text

, , +11

Surface contamination and damage from CF4 and SF6 reactive ion etching of silicon oxide on gallium arsenide

K. L. Seaward, N. Moll, William F. Stickle · Journal of Electronic Materials · 1990 · 30 citations

, , +9

Semiconductor damage from inert and molecular gas plasmas

K. L. Seaward, N. Moll · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 29 citations

, , +12

Passivation of GaAs surfaces and AlGaAs/GaAs heterojunction bipolar transistors using sulfide solutions and SiN<i>x</i> overlayer

V. Malhotra, L.H. Camnitz, K. L. Seaward et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1995 · 24 citations

, , +9

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