Wilhelm J. Egle

Microanalysis in the EM 902: Tests on a new TEM for ESI and EELS

Wilhelm J. Egle, A. Rilk, Johannes Bihr et al. · Proceedings annual meeting Electron Microscopy Society of America · 1984 · 21 citations

Engineering, Microscopy, Elemental Mapping +22

EUV spectral purity filter: optical and mechanical design, grating fabrication, and testing

Holger Kierey, Klaus Heidemann, Bernd H. Kleemann et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 18 citations

Optical Materials, Engineering, Optic Design +16

Manufacturing of Wolter-I mirror segments with slumped glass

Péter Friedrich, B. Aschenbach, Christoph Braig et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 14 citations

Engineering, Adequate Metrology, High Precision Glass +17

Mirror system for the German x-ray satellite ABRIXAS: I. Flight mirror fabrication, integration, and testing

Juergen Altmann, Wilhelm J. Egle, Ulrich Bingel et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1998 · 10 citations

Optical Materials, Engineering, Flight Mirror Fabrication +22

Source collection optics for EUV lithography

Piotr Marczuk, Wilhelm J. Egle · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 10 citations