Concepedia
1
Publications
10
Citations
H-Index
2004
Active since
Affiliations
Carl Zeiss (Germany)(Current)
Piotr Marczuk is an author at Carl Zeiss (Germany).
Publications per year
2004–2004
Source collection optics for EUV lithography
Piotr Marczuk, Wilhelm J. Egle · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 10 citations
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