K. K. Khaw

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Active since

1996

Affiliations

Lam Research (United States)(Current)

City University of Hong Kong

National University of Singapore

K. K. Khaw is an author at Lam Research (United States) specializing in defects in electronic materials, electronic materials, and materials engineering.

Publications per year

1996–2006

Publications

A Comparison of Defect States in Tantalum Pentoxide (Ta2O5) Films after Rapid Thermal Annealing in O2 or N2O by Zero-Bias Thermally Stimulated Current Spectroscopy

W. S. Lau, K. K. Khaw, Peng Wei Qian et al. · Japanese Journal of Applied Physics · 1996 · 29 citations

Natural Sciences, Materials Engineering, Materials Science +17

Defect states responsible for leakage current in Ta2O5 films on Si due to Si contamination from the substrate

W. S. Lau, K. K. Khaw, Peisen Qian et al. · Journal of Applied Physics · 1996 · 24 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Mechanism of leakage current reduction of tantalum oxide capacitors by postmetallization annealing

W. S. Lau, K. K. Khaw, Taejoon Han et al. · Applied Physics Letters · 2006 · 12 citations

Natural Sciences, Materials Engineering, Materials Science +15

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