Concepedia
Statistics
Publications
2
Citations
27
H-Index
Active since
2013
Affiliations
IMEC(Current)
Angelica Lee is an author at IMEC specializing in metrology, defect inspection, and engineering.
Publications per year
2013–2016
Process window discovery methodology development for advanced lithography
Dieter Van den Heuvel, Philippe Foubert, Bart Baudemprez et al. · 2016 · 14 citations
Engineering, Manufacturing Engineering, Manufacturing Processes +15
Electrical properties of platinum interconnects deposited by electron beam induced deposition of the carbon-free precursor, Pt(PF3)4
Colm O’Regan, Angelica Lee, Justin D. Holmes et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2013 · 13 citations
Natural Sciences, Materials Engineering, Materials Science +17
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