Concepedia

Tadashi Shinmura

TS

Statistics

Publications

6

Citations

116

H-Index

6

Active since

1991

Affiliations

Toshiba (Japan)(Current)

Tadashi Shinmura is an author at Toshiba (Japan) specializing in materials science, natural sciences, and surface science.

Publications per year

1991–2008

6

Publications

6

Quantum Chemical Molecular Dynamics Simulation of the Plasma Etching Processes

Katsumi Sasata, Toshiyuki Yokosuka, Hitoshi Kurokawa et al. · Japanese Journal of Applied Physics · 2003 · 37 citations · Full text

, , +17

Parabolic dispersion and effective mass of hot electrons in oriented thin films of copper phthalocyanine determined by means of low-energy-electron transmission

Nobuo Ueno, Kazuyuki Sugita, Tadashi Shinmura · Physical review. B, Condensed matter · 1991 · 24 citations

, , +14

Predictable topography simulation of SiO<sub>2</sub>etching by C<sub>5</sub>F<sub>8</sub>gas combined with a plasma simulation, sheath model and chemical reaction model

Shigeyuki Takagi, Seiji Onoue, Katsumi Iyanagi et al. · Plasma Sources Science and Technology · 2003 · 16 citations

, , +17

Study on Surface Modification of Indium Tin Oxide and Resist Surfaces Using CF<sub>4</sub>/O<sub>2</sub> Plasma for Manufacturing Organic Light-Emitting Diodes by Inkjet Printing

Masakuni Ikagawa, Ichiro Tohno, Tadashi Shinmura et al. · Japanese Journal of Applied Physics · 2008 · 16 citations

, , +17

Topography Simulation of Reactive Ion Etching Combined with Plasma Simulation, Sheath Model, and Surface Reaction Model

Shigeyuki Takagi, Katsumi Iyanagi, Seiji Onoue et al. · Japanese Journal of Applied Physics · 2002 · 13 citations

, , +17

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