Frank E. Abboud

Multi-beam mask writer in EUV era: challenges and opportunities

Bassam Shamoun, Mahesh Chandramouli, Bin Liu et al. · 2021 · 21 citations

Multi-beam Mask Writer, Engineering, Beam Optic +14

Future mask writers requirements for the sub-10nm node era

Mahesh Chandramouli, Frank E. Abboud, Nathan Wilcox et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 20 citations

Mask data processing in the era of multibeam writers

Frank E. Abboud, Michael Asturias, Maesh Chandramouli et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 15 citations

Feasibility study of new graybeam writing strategies for raster scan mask generation

Andrew Murray, Frank E. Abboud, Frederick Raymond et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1993 · 14 citations

Grid Resolution, Engineering, Medical Imaging +8

EUV mask infrastructure and actinic pattern mask inspection

Ted Liang, Yoshihiro Tezuka, Marieke F. Jager et al. · 2020 · 12 citations

Engineering, Inspection, Pattern Scaling +17