Statistics
Publications
3
Citations
63
H-Index
3
Active since
2005
Lorena Page is an author at Advanced Micro Devices (United States) specializing in manufacturing engineering, engineering, and metrology.
Publications per year
2005–2007
3
3
Evaluation of OPC quality using automated edge placement error measurement with CD-SEM
Cyrus Tabery, Hidetoshi Morokuma, Akiyuki Sugiyama et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 28 citations
Engineering, Manufacturing Engineering, Manufacturing Processes +8
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