Statistics
Publications
3
Citations
57
H-Index
3
Active since
2005
Affiliations
Ryoichi Matsuoka is an author at Hitachi High-Tech (Japan) specializing in manufacturing engineering, engineering, and edge placement error.
Publications per year
2005–2009
3
3
A new matching engine between design layout and SEM image of semiconductor device
Hidetoshi Morokuma, Akiyuki Sugiyama, Yasutaka Toyoda et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 18 citations
Engineering, Electrical Engineering, Manufacturing Engineering +11
High-precision contouring from SEM image in 32-nm lithography and beyond
Hiroyuki Shindo, Akiyuki Sugiyama, Hitoshi Komuro et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2009 · 18 citations
Engineering, Manufacturing Engineering, Digital Fabrication +14
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