Concepedia

Jo A. McMillan

JA

Statistics

Publications

4

Citations

101

H-Index

4

Active since

1989

Affiliations

Cornell University(Current)

Jo A. McMillan is an author at Cornell University specializing in engineering, electrical engineering, and electron beam lithography.

Publications per year

1989–1992

4

Publications

4

Selective chemical vapor deposition of tungsten for microelectromechanical structures

Noel C. MacDonald, L.Y. Chen, J. Yao et al. · Sensors and Actuators · 1989 · 53 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Fast proximity effect correction: An extension of PYRAMID for circuit patterns of arbitrary size

Joseph Jacob, Soo-Young Lee, Jo A. McMillan et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1992 · 20 citations

Engineering, Computer Science, Electrical Engineering +13

Proximity effect correction in electron-beam lithography: A hierarchical rule-based scheme—PYRAMID

Soo-Young Lee, Joseph Jacob, Chung‐Ming Chen et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 17 citations

Engineering, Computer Engineering, Electrical Engineering +9

Simulation of electron beam exposure of submicron patterns

Jo A. McMillan, Sylvester Johnson, Noel C. MacDonald · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1989 · 11 citations

Engineering, Electrical Engineering, Materials Science +12

1–4 of 4